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SEMINAR: CMCA Seminar: Increasing the performance and analytical power of FIB-SEMs

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Today's date is Thursday, February 25, 2021
CMCA Seminar: Increasing the performance and analytical power of FIB-SEMs Other events...
Xe plasma FIBs or iFIBs offer extremely high material removal rates and very low contamination compared to conventional gallium FIBs. As such, Xe plasma FIBs have great potential in applications such as failure analysis and MEMS fabrication in the semiconductor industry as well as in generating large TEM samples and 3D tomography/EDS/EBSD datasets. In this talk we will explain the advantages of Xe plasma FIBS from both a physico-chemical perspective and an efficiency perspective based on the physics of how they work and their performance.
Speaker(s) Antonin Doupal, TESCAN
Location CMCA Seminar Room 1.80, Physics Building
Contact Antonin Doupal <[email protected]> : 02 9450 1359
Start Thu, 02 Mar 2017 15:00
End Thu, 02 Mar 2017 16:00
Submitted by CMCA Admin <[email protected]>
Last Updated Tue, 14 Feb 2017 10:04
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